منابع مشابه
Fabrication of flexible mold for hybrid nanoimprint-soft lithography
0167-9317/$ see front matter 2011 Elsevier B.V. A doi:10.1016/j.mee.2010.12.107 ⇑ Corresponding author. E-mail address: [email protected] (J We fabricated molds consisting of features in rigid UV-cured resist on an elastic poly(dimethylsiloxane) (PDMS) support for hybrid nanoimprint-soft lithography. The molds were duplicated through coating and curing a UV-curable resist onto a pol...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2010
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.76.152